Park Systems acquires Accurion GmbH


Imaging Spectroscopic Ellipsometry and Active Vibration Isolation Add to Park’s Nanometrology Business Portfolio

Seoul, South Korea, September 2, 2022 /PRNewswire/ — Park Systems Corp. today announced the acquisition of Accurion GmbH, a private company that develops and manufactures imaging spectroscopic ellipsometers and active vibration isolations. This acquisition adds to Park’s portfolio in atomic force microscopy and white light interferometric microscopy. Financial details of the transaction were not disclosed.

Based in Göttingen, Germany, Accurion GmbH pioneered the field of imaging spectroscopic ellipsometry. Originally a spin-off from the Max Planck Institute for Biophysical Chemistry, the company began by designing the Brewster Angle Microscope for the characterization of ultrathin films. As these microscopes were found to be sensitive to vibration, the active vibration isolation division followed.

Accurion’s imaging ellipsometers combine the advantages of ellipsometry and optical microscopy in a single device. The unification of the two technologies creates a unique metrology tool that redefines the limits of ellipsometric measurements and polarization contrast microscopy. The improved spatial resolution of imaging ellipsometers extends ellipsometry to new areas of microanalysis, microelectronics and bioanalysis.

“This is Park’s first-ever business acquisition in company history, and we are very pleased to add this historic high-tech company to our business,” said Dr Sang-il. Park, CEO of Park Systems. “Accurion’s imaging ellipsometers and active vibration isolation will have a broad product line and commercial synergies with Park’s existing atomic force microscopy line, which will benefit both our customers and our investors.

“We are honored to be part of Park Systems,” added Stephan Ferneding, co-founder and CEO of Accurion. “We are thrilled that Park’s expertise and global reach in sales and service in the field of automated systems for industrial manufacturing will take the company to the next level. We look back on 30 years of experience enabling technological and scientific advancement for customers around the world. We look forward to continued success with a strong partner like Park Systems.”

About Accurion GmbH

Accurion provides high-end, reliable, state-of-the-art technology in two product lines: Imaging Ellipsometry and Active Vibration Isolation. In 2009, Halcyonics GmbH, specialist in active vibration isolation solutions and Nanofilm Technology GmbH, expert in surface analysis tools merged with Accurion GmbH. With 30 years of valuable experience enabling technological and scientific progress for customers around the world, Accurion designs and manufactures state-of-the-art instruments for difficult measurement tasks,

About Park Systems Corp. (KOSDAQ: 140860)

Park Systems is the world’s fastest growing manufacturer of Atomic Force Microscopy (AFM) systems, with a comprehensive product line for researchers and engineers in the chemical, materials, physics, life sciences, semiconductors and data storage. The mission is to enable advances at the nanoscale for scientists and engineers by solving the world’s most pressing problems and pushing the boundaries of scientific discovery and technical innovation. Park Systems customers include most of the world’s top 20 semiconductor companies and national research universities in Asia, Europe and the Americas. Park Systems is a listed company on the Korea Stock Exchange (KOSDAQ) with headquarters in Suwon, Korea and regional headquarters in Santa Clara, CaliforniaMannheim, Paris, beijing, Tokyo, Singapore, Indiaand Mexico City. To learn more about Park Systems, please visit

SOURCE Park Systems Corp.


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